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 Home > Product > Asher > MPA-200
    MICROWAVE ASHER

MPA-200

Feature
 

2.45GHz microwave plasma source
Available to 200mm (8 inch)wafer
For removal photo resister
1)  Striping process for High-dose ion implantation /Dry etching
2)  Descum for Lift-off metallization

3)  Surface cleaning for Pre-process of Wet or dry plasma etching 
4)  Removal of organic passivation layer and resist 
5)  Removal of SU-8 or epoxy resist


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